課程名稱 |
微奈米機電系統 Micro-electro-mechanical System & Nanotechnology |
開課學期 |
102-1 |
授課對象 |
工學院 應用力學研究所 |
授課教師 |
黃榮山 |
課號 |
AM7084 |
課程識別碼 |
543EM5850 |
班次 |
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學分 |
3 |
全/半年 |
半年 |
必/選修 |
選修 |
上課時間 |
星期二3,4,@(10:20~) |
上課地點 |
應107 |
備註 |
本課程以英語授課。 總人數上限:35人 |
Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/1021MEMS |
課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
課程大綱
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課程概述 |
The use of conventional semiconductor process and other microfabrication technologies to create miniaturized sensors, actuators, and structures has become increasingly accepted in many areas of science and engineering. This course is interdisciplinary nature of micromachining techniques and their applications. Use of these technologies has resulted in an unprecedented range of devices that can be employed in applications through either displacement of macroscopic competitors or by enabling functions that are impossible. In addition to the micro science and engineering lecture, the course will also provide lab project for simplified hands-on experiment to gain practical sense of micro world. |
課程目標 |
1. What is MEMS? Introduction to Microscopic World
2. Review of Standard VLSI Microfabrication, Processes in CMOS
3. Micromachining Process
4. Cleanroom visit
5. MEMS Fabrication Process I & II : bulk & Surface Micromachining:
6. Micro sensors: Physical and Chemical
7. Corporate visit or invited lecture (to be arranged)
8. Nano Technology:Atomic force Microscopy, Scanning Near-field Microscopy, Scanning Tunneling Microscopy
9. Biosensors
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課程要求 |
Project+Presentation: 5% + 10% + 25% = 40%
Q&A: 15 %
Final exam: 45%
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預期每週課後學習時數 |
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Office Hours |
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指定閱讀 |
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參考書目 |
1. M. Madou, Foundamentals of Microfabrication, 1997 (CRC Press).
2. G.T.A. Kovacs, Micromachined Transducer Sourcebook, 1998S. D. Senturia, Microsystem Design, 2001 (Kluwer Academic publishers)莊達人, VLSI 製造技術, 1995 (高立圖書有限公司)
3. S.M. Sze, VLSI Technology, 2nd ed., 1988 (McGraw Hill).
4. 積體電路製程及設備技術手冊, 張俊彥主編, 1997.
5. R. Muller et. al., Microelectromechanical Systems: Advanced Materials &
Fabrication Methods, 1997 (National Academy Press).
6. Williams S. Trimmer (ed), Micromechanics and MEMS:
classic and seminal papers to 1990, 1996 (IEEE Press)
7. Charles P. Poole Jr., Frank J. Owens, Introduction to Nanotechnology, Wiley, 2003
8. T.-J. Chung, P.M. Anderson, M.-K. Wu, and S. Hsieh, Nanomechanics of
Materials and Structure, Springer, 2006
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評量方式 (僅供參考) |
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週次 |
日期 |
單元主題 |
Week 1 |
9/10 |
Introduction of microsystem and its applications |
Week 2 |
9/17 |
Introduction of microsystem and its applications |
Week 3 |
9/24 |
Introduction of microsystem and its applications |
Week 4 |
10/05 |
Review of Standard VLSI Microfabrication, Processes in CMOS |
Week 5 |
10/1 |
Foundry process |
Week 6 |
10/8 |
Micromachining Process |
Week 7 |
10/15 |
Cleanroom field visit |
Week 8 |
10/22 |
MEMS Fabrication Process I & II : bulk & Surface Micromachining |
Week 9 |
10/29 |
MEMS Fabrication Process I & II : bulk & Surface Micromachining |
Week 10 |
11/5 |
MEMS Fabrication Process I & II : bulk & Surface Micromachining |
Week 11 |
11/12 |
Micro sensors: Physical and Chemical |
Week 12 |
11/19 |
Micro sensors: Physical and Chemical |
Week 13 |
11/26 |
Micro sensors: Physical and Chemical |
Week 14 |
12/3 |
Nano Technology:
Atomic force Microscopy, Scanning Near-field Microscopy, Scanning Tunneling Microscopy
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Week 15 |
12/10 |
Nano Technology:
Atomic force Microscopy, Scanning Near-field Microscopy, Scanning Tunneling Microscopy
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Week 16 |
12/17 |
Biosensor |
Week 17 |
12/24 |
Biosnesor |
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